High fidelity fabrication of microlens arrays by nanoimprint using conformal mold duplication and low-pressure liquid material curing
نویسندگان
چکیده
The authors present a novel hyperfidelity fabrication method for microlens arrays. The method consists of the steps of a fabrication of a sacrificial master mold of a microlens array in a soft polymer by photolithography and thermal reflow, b conformal duplication of a daughter mold of complementary patterns in a hard material by dispensing an UV-curable material liquid on top of the polymer mold, planarizing the liquid with a flat quartz substrate, and curing the material, and c fabrication of microlens array using the hard daughter mold and nanoimprinting with an UV-curable lens material. This method has several advantages over conventional fabrication methods of microlens arrays including hyperfidelity, low cost, and high throughput. © 2007 American Vacuum Society. DOI: 10.1116/1.2713405
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